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ENTG News Entegris Reaches Semiconductor Industry Milestone by Surpassing 300th Successful Aeronex(R) Gas Purification System Installation

CHASKA, Minn.--(BUSINESS WIRE)--Entegris Inc. (NASDAQ: ENTG) has reached an important industry milestone that demonstrates the successful adoption of ambient technology as a more reliable and cost-effective alternative to conventional gas purification systems. The company, a pioneer in the use of clean dry air as a gas purification solution, recently surpassed its 300^th Aeronex^® Gas Purification System install. Using ambient technology to reduce gaseous contaminants and non-methane hydrocarbons to the sub-parts-per-billion (ppb) levels, the Aeronex family of systems requires no power or heat for purification, providing manufacturers with the lowest total cost of ownership.

“The industry has been clamoring for an alternative to conventional gas purification systems that can cause process variability, reduce yield and shorten tool life,” said Patrick McKinney, vice president and general manager, microenvironments, Entegris. “Semiconductor manufacturers are recognizing the benefits of reducing total cost of ownership and achieving continuous pure gas supply by deploying Aeronex systems. It’s a clear, compelling alternative to legacy methods.”

Used in semiconductor and compound semiconductor manufacturing, Aeronex systems eliminate safety and reliability issues associated with Palladium cells (Pd-cells) such as high pressures, cell poisoning and cell cracking due to power failure. Unlike other gas purification technologies, Aeronex systems do not contain hydrocarbons that outgas during normal or upset conditions. Aeronex purifiers also effectively remove contaminants from reticle carriers and wafer shippers while preventing haze, a costly byproduct in wafer fabrication.

All members of the Aeronex family of systems use two self-regulating purifiers to maintain a continuous flow of pure gas. This unique system design improves safety by placing all purifiers in a single location, and eliminates environmental concerns because the purifiers are regenerable. The 300 Entegris Aeronex systems have been deployed in the United States, China, Korea, Japan, Belgium, Israel and other locations worldwide.

For more information, please visit Entegris at exhibit # 2B-501 at Semicon Japan, December 6-8.

ABOUT ENTEGRIS

Entegris is the global leader in materials integrity management – delivering a wide range of products for purifying, protecting and transporting critical materials used in processing and manufacturing in semiconductor and other high tech industries. Entegris is ISO 9001-certified and has manufacturing, customer service or research facilities in the United States, China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at www.entegris.com.

Aeronex^® is a registered trademark of Entegris Inc.