Message #52 From:
NewsBot Date: December 6, 2006 03:41:00 PM
ENTG News New 200mm Wafer Shipper Reduces Contamination During Transport
CHASKA, Minn.--(BUSINESS WIRE)--The new Ultrapak®
Edge Guard 200mm wafer shipping box from Entegris Inc. (NASDAQ:ENTG),
provides reduced edge contamination in a proven secure shipping
environment. Users can expect to see a reduction of 50 percent or
greater in particle contamination due to edge contact.
As the semiconductor industry moves to smaller linewidth device
geometries, device makers are looking to reduce particulate
contamination in the previously ignored edge exclusion area. “Semiconductor
manufacturers using 200mm wafers are increasingly concerned with
maximizing the usable wafer area,” said
Patrick McKinney, vice president and general manager, microenvironments,
Entegris. “The new Entegris Ultrapak Edge
Guard reduces particle contamination from edge contact lowering the
potential for particle-induced device defects during circuit fabrication.”
Designed for reuse, the new Ultrapak Edge Guard 200mm shipper also
delivers the established benefits of the highly successful Ultrapak
shipping boxes. Horizontal and vertical robotic pickup flanges on the
cassette allow for convenient handling, while center notch track
alignment and “H”
bar features ensure accurate equipment interoperability.
ABOUT ENTEGRIS
Entegris is the global leader in materials integrity management –
delivering a wide range of products for purifying, protecting and
transporting critical materials used in processing and manufacturing in
semiconductor and other high tech industries. Entegris is ISO
9001-certified and has manufacturing, customer service or research
facilities in the United States, China, France, Germany, Japan,
Malaysia, Singapore, South Korea and Taiwan. Additional information can
be found at www.entegris.com.
Ultrapak® is a
registered trademark of Entegris Inc.
